Diamond-like-carbon (DLC) master creation for use in soft lithography using the Atomic Force Microscope (AFM)

Diamond-like-carbon (DLC) master creation for use in soft lithography using the Atomic Force Microscope (AFM)

Two and three dimensional polymeric structures at the nano and micro scale are increasingly being incorporated into micro and nano scale devices. Soft lithography can be employed for the creation of templates where a polymer replica can be produced. Obtaining a master is one of the limiting factors in the production of such replicas. This study demonstrates pattern generation on a highly durabl...

Lithography of diamond-like-carbon (DLC) films for use as masters in soft-lithography

Copyright Statement Copyright 2006 Society of Photo-Optical Instrumentation Engineers. This paper was published in SPIE volume 6037: Device and Process Technologies for Microelectonics, MEMS, and Photonics IV and is made available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to...

Atomic force microscope based nanofabrication of master pattern molds for use in soft lithography

The authors have developed a technique that couples nanolithographic patterning using an atomic force microscope with the parallel patterning abilities of soft lithography. Master pattern generation is accomplished using local anodic oxidation as a mask pattern for anisotropic wet etching of Si 110 . The resulting nanostructures are then used as master patterns for the molding of polymeric stam...

Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe

Atomic force microscope (AFM) equipped with diamond-like carbon (DLC)-coated Si probe has been used for scratch nanolithography on Si surfaces. The effect of scratch direction, applied tip force, scratch speed, and number of scratches on the size of the scratched geometry has been investigated. The size of the groove differs with scratch direction, which increases with the applied tip force and...

Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications